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PHM Tools for Semiconductor Manufacturing Predictability

by Wenyu — last modified 2012-01-17 17:47

Prof. Jay Lee and Ph.D. researcher Edzel Lapira co-author article for magazine "Nanochip Fab Solutions", titled "Prognostic and Health Management Tools for Semiconductor Manufacturing Predictability". It is available for download.

News: IMS Wind Turbine PHM Featured in Media 2012-04-30; Prof. Jay Lee Speaks at SIAC EV Partner Conference 2012-04-15; IMS Paper Ranked Top 25 in Annual Reviews in Control 2012-03-27; IMS Presents at Univ. of Cincinnati Statehouse Showcase 2012-03-15; PHM Tools for Semiconductor Manufacturing Predictability 2012-01-17; More news…

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